Hybrid Electrostatic Chucks
With over 25 years of experience, Hybrid Electrostatic (HES) Industries, LLC. applies a consultative approach to deliver personalized ESC's to the semiconductor industry that meet and exceed customers expectations.
Industry Focus
Tool Manufacturers
Semiconductor
Lithography
Solar
LED
MEMS
Applications
Etch Process
HPD-CVD and PVD
Ion Implantation
Metrology
Dielectric Substrates
(LED and Solar Applications)
Industry Standards
Compliant to Major OEM Specifications including Quality, Packaging, Performance, and Cleanliness
File Formats
Available to import most software; Solidworks, IGES, STEP, DXF
electrostatic chucks
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Wide range of electrostatic chucks for semiconductor tools such as CVD, Plasma etch, ion implant, and metrology.
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Chucks range in size from 100mm to 450mm.
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HES Industries, LLC. designs, manufactures, and completely tests these products for field proven performance as required by each customer.
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Proven for high purity, low-particle generation, and long process life.
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HES Industries works with its customers to develop complete solutions for complex product development.
innovative manufacturing
HES Industries employs a dedicated R&D and engineering staff that is committed to providing each customer with individualized service and design to produce an electrostatic chuck (ESC) that meets their application.
Hybrid esc with interdigitated electrode design
There is a high demand in some semiconductor processes to clamp dielectric substrates such as sapphire, glass, and more. HES Industries has developed new interdigitated electrode
designs and manufacturing processes. This advanced design and manufacturing methodology allows customers to choose an optimal design based on their specific process requirements.
Our proprietary manufacturing process enables HES Industries to fabricate ESCs from 75mm to 450mm with customer specified geometries. All ESCs feature high clamping forces, quick chuck and de-chuck times, and anti-arc design for high bias application.