Hybrid Electrostatic Chucks
With over 25 years of experience, Hybrid Electrostatic (HES) Industries, LLC. applies a consultative approach to deliver personalized ESC's that meet and exceed customers expectations.
electrostatic chucks
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Wide range of electrostatic chucks for semiconductor tools such as CVD, Plasma etch, ion implant, and metrology.
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Chucks range in size from 100mm to 450mm.
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HES Industries, LLC. designs, manufactures, and completely tests these products for field proven performance as required by each customer.
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Proven for high purity, low-particle generation, and long process life.
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HES Industries works with its customers to develop complete solutions for complex product development.
Hybrid esc with interdigitated electrode design
There is a high demand in some semiconductor processes to clamp dielectric substrates such as sapphire, glass, and more. HES Industries has developed new interdigitated electrode
designs and manufacturing processes. This advanced design and manufacturing methodology allows customers to choose an optimal design based on their specific process requirements.
